arXiv:2510.08044v1 Announce Type: cross Abstract: Large language models (LLMs) demonstrate advanced reasoning abilities, enabling robots to understand natural language instructions and generate high-level plans with appropriate grounding. However, LLM hallucinations present a significant challenge, often leading to overconfident yet potentially misaligned or unsafe plans. While researchers have explored uncertainty estimation to improve the reliability of LLM-based planning, existing studies have not sufficiently differentiated between epistemic and intrinsic uncertainty, limiting the effectiveness of uncertainty esti- mation. In this paper, we present Combined Uncertainty estimation for Reliable Embodied planning (CURE), which decomposes the uncertainty into epistemic and intrinsic uncertainty, each estimated separately. Furthermore, epistemic uncertainty is subdivided into task clarity and task familiarity for more accurate evaluation. The overall uncertainty assessments are obtained using random network distillation and multi-layer perceptron regression heads driven by LLM features. We validated our approach in two distinct experimental settings: kitchen manipulation and tabletop rearrangement experiments. The results show that, compared to existing methods, our approach yields uncertainty estimates that are more closely aligned with the actual execution outcomes.