taiyangnews 08月18日
From Throughput To Advanced Process Optimization
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太阳能电池生产设备正经历从单纯追求高产能到精细化管理的转变。尽管当前单体设备产能已远超早期需求,如湿法制程设备产能提升15%-25%,但行业重点已转向水资源和废弃物管理。在电池片核心工艺方面,金字塔结构尺寸从1μm优化至5μm,凸显了文本uring添加剂的重要性。选择性发射极技术因激光辅助金属化而逐渐被淘汰,取而代之的是超高电阻率发射极。TOPCon电池技术成为主流,PECVD工艺在隧道氧化层和多晶硅沉积方面优势凸显,与LPCVD技术市场份额并驾齐驱。激光技术的应用贯穿TOPCon和BC电池生产,特别是在BC电池的图形化处理中是实现多GW产能的关键。IV表征设备也在为Tandem电池技术做准备,LED光源成为主流。

🎯 **生产设备重心转移,精细化管理成新焦点**:传统上以产能、良率和材料消耗为主要评估指标的生产设备,现已将重点转向更精细化的管理。尽管当前设备产能已大幅提升,湿法制程设备产能增长15%-25%,但行业已将目光投向水资源和废弃物管理,例如RENA公司提出了未来几年内将用水量减少70%的路线图,标志着行业向可持续发展和资源优化迈进。

💡 **工艺技术持续深化,性能优化不止步**:在电池片制造的核心工艺上,如金字塔结构,优化已从1μm发展到5μm,这得益于文本uring添加剂的进步。同时,选择性发射极技术因激光辅助金属化的出现而逐渐被淘汰,取而代之的是最高可达500Ω/sq的超高电阻率发射极,这使得发射极形成与金属化工艺的动态解耦,为性能提升提供了更大空间。

🚀 **TOPCon技术成为主流,PECVD与LPCVD并驾齐驱**:TOPCon电池技术已成为当前的主流参考技术,其核心在于钝化工艺。在钝化技术的竞争中,PECVD凭借其在隧道氧化层和多晶硅沉积方面的集成优势,解决了LPCVD存在的外部掺杂和环绕问题,获得更多青睐。虽然LPCVD通过改进工艺(如双片同槽)已大幅提升竞争力,与PECVD的市场份额不相上下,共同推动TOPCon技术的发展。

✨ **激光技术应用广泛,驱动BC技术规模化**:激光技术在太阳能电池生产中的应用日益广泛,不仅在TOPCon电池的发射极优化和接触形成中发挥作用,在BC(背接触)电池技术中更是扮演着关键角色。激光在BC电池中的图形化处理是实现多GW产能的关键驱动力,体现了技术创新对规模化生产的支撑作用。

📊 **IV表征聚焦Tandem,迎接下一代技术**:IV表征设备在BC技术准备就绪的同时,已将重心转向Tandem电池技术。Tandem电池的复杂光谱吸收特性,使得LED光源成为其表征工具的主流选择,目前LED光源供应商正大规模生产相关设备,预示着Tandem技术将成为未来的研究热点和技术发展方向。

Historically, the primary evaluation point for production equipment has been throughput, followed by mechanical yield and material consumption. These are no longer the key points of optimization for major equipment vendors. The majority of production equipment platforms achieve very high throughput. Today, there are single tools available for certain processes with production capacities exceeding GW-scale. It would be no exaggeration to say that this segment has evolved far beyond its fundamental requirements.

We can also see this reflected in the current survey on Solar Cell Production Equipment 2025. Starting with the wet-chemical benches used for surface preparation, throughputs have increased by 15% to 25% over the levels described in our previous survey in 2023. Among the most notable developments in the wet-chemical systems is the focus on the management of water and waste, which have become an essential feature for 2 companies – RENA and SCHMID. The former even presented a roadmap to reduce water usage by 70% in the coming years.

Moving to the core of the process, a pyramid size of about 1 μm was characterized as optimum in our previous survey. Today, companies are able to extract even better performance with pyramids of about 5 μm. This speaks to the importance of the developments in the additives segment in texturing, which has not changed, however. What’s also new over the previous survey is that all leading suppliers are capable of supporting BC, which, while sharing the same fundamentals, are often ‘critical’ and ‘complex’.

A key observation in the area of emitter formation in the previous survey was that the industry was moving towards selective emitters. A lot has changed during the last year and a half. Not only were laser-doped selective emitters adopted as the standard, but they have also been pushed into obsolescence since, courtesy of laser-assisted metallization. This approach has simply decoupled the dynamics of emitter formation from metallization requirements. As a result, a few cell makers are evaluating emitters with ultrahigh sheet resistance of up to 300 Ω/sq, while the survey also has a reference to an even higher 500 Ω/sq. And thus, selective emitters have lost their relevance in the industry.

The reference technology for this survey is TOPCon, the core of which is passivation. There has been a constant race between LPCVD and PECVD for this critical step of TOPCon processing. LPCVD was the predominant technology during its days of inception, but with 2 shortcomings – external doping and wraparound. To address the latter, the industry adopted single-wafer-per-slot loading, which adversely affects the throughput. PECVD, with the ability to accomplish all the processes – application of tunneling oxide and polysilicon, and in-situ doping – addresses both these challenges. As a result, more and more cell makers started turning to PECVD, as elaborated in our previous report.

LPCVD has since staged a comeback, with updates that enabled the technology to process 2 wafers per slot and keep the wraparound within acceptable limits. As a result, now both technologies have nearly the same market share. While PVD was also known to support the core TOPCon process, it was mainly proprietary, with no tools available in the open market. A mainstream equipment supplier has recently started offering the technology commercially. Edge passivation is another development that can be classified as a passivation trend. Typically, ALD tools are used to deposit aluminum oxide here.

The most notable development not only in the field of metallization, but all along TOPCon processing, is laser-assisted metallization. This process uses a laser to form the front contacts of TOPCon solar cells. In addition to emitter optimization, as mentioned above, it also enables the optimization of metallization pastes used on the front as well as the rear. Reducing or eliminating aluminum content from the front pastes and lowering the silver loading of rear pastes are 2 examples of the positive outcomes of laser-based metallization. As for the developments associated with the tools to apply these pastes, their throughput has also increased between 15% and 25%.

Another notable development here is that stencil printing is gradually replacing the mesh screens, enabling fine-line printing. The survey includes one citation to screen openings of a mere 10 μm. As with the equipment for other process stations, the metallization segment is also running full steam on the optimization of hardware as well as the printing media for BC technology.

One process station that has remained unexcited about BC, but already thinking beyond it – read, tandem technology – is IV characterization. This segment has long been ready with the tweaks for BC. However, the hot topic in this segment is the characterization of tandem cells with sophisticated light source engineering, where each sub-cell absorbs different parts of the spectrum. LED-based light engines are enjoying a monopoly here, and their suppliers are currently making tools in high volumes for labs. No wonder then that ‘tandem’ is the buzzword in the research community.

Another notable overall improvement in the equipment segment is the increasing application of lasers. Today, lasers play a key role both in mainstream TOPCon and in BC. While lasers were used in emitter engineering for TOPCon, their role is now more relevant to establishing the contacts. In BC processing, however, lasers play a bigger role, where they accomplish the patterning. In fact, the development of lasers for patterning is the key enabler for the rollout of multi-GW production capacities built on BC cell technology.

Overall, PV is becoming increasingly progressive. While PERC was an integral part of our previous survey, published in 2023, most production equipment makers were eager to showcase their solutions for TOPCon. In the current survey, TOPCon is the mainstay, even as BC and tandem continue to grab attention. Perhaps TOPCon will become the point of reference in our next survey, like PERC 2 years ago.

This is the conclusion part of TaiyangNews latest report on Solar Cell Production Equipment 2025, which can be downloaded for free here.

We will release the subject-wise parts of the survey in our upcoming articles, published under the Technology category on our website.

TaiyangNews hosts 2 upcoming conferences in September: the Cell & Module Production Equipment & Processing Materials Conference on September 2, 2025, free registration here, and Solar Made in the USA on September 8, 2025 in Las Vegas: register via RE+ here.

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太阳能电池 生产设备 TOPCon BC技术 激光技术
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